Treatment approach to improve film roughness by improving nucleation/adhesion of silicon oxide

ABSTRACT

In one implementation, a method of forming an amorphous silicon layer on a substrate in a processing chamber is provided. The method comprises depositing a predetermined thickness of a sacrificial dielectric layer over a substrate. The method further comprises forming patterned features on the substrate by removing portions of the sacrificial dielectric layer to expose an upper surface of the substrate. The method further comprises performing a plasma treatment to the patterned features. The method further comprises depositing an amorphous silicon layer on the patterned features and the exposed upper surface of the substrate. The method further comprises selectively removing the amorphous silicon layer from an upper surface of the patterned features and the upper surface of the substrate using an anisotropic etching process to provide the patterned features filled within sidewall spacers formed from the amorphous silicon layer.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application claims benefit of U.S. Provisional Patent ApplicationSer. No. 62/482,872, filed Apr. 7, 2017, which is incorporated herein byreference in its entirety.

BACKGROUND Field

Implementations described herein generally relate to the fabrication ofintegrated circuits and particularly to the formation of spacers.

Description of the Related Art

Integrated circuits have evolved into complex devices that can includemillions of transistors, capacitors and resistors on a single chip. Theevolution of chip designs continually involves faster circuitry andgreater circuit density. The demands for faster circuits with greatercircuit densities impose corresponding demands on the materials used tofabricate such integrated circuits. In particular, as the dimensions ofintegrated circuit components are reduced to the sub-micron scale, it isnow necessary to use low resistivity conductive materials as well as lowdielectric constant insulating materials to obtain suitable electricalperformance from such components. However, these low dielectric constantinsulating materials often suffer from roughness issues, which increasesroughness in subsequently deposited films and may affect adhesionbetween films.

Therefore, there is a need for improved methods of forming thin filmswith reduced roughness.

SUMMARY

Implementations described herein generally relate to the fabrication ofintegrated circuits and particularly to the formation of spacers. In oneimplementation, a method of forming an amorphous silicon layer on asubstrate in a processing chamber is provided. The method comprisesdepositing a predetermined thickness of a sacrificial dielectric layerover a substrate. The method further comprises forming patternedfeatures on the substrate by removing portions of the sacrificialdielectric layer to expose an upper surface of the substrate. The methodfurther comprises performing a plasma treatment to the patternedfeatures. The method further comprises depositing an amorphous siliconlayer on the patterned features and the exposed upper surface of thesubstrate. The method further comprises selectively removing theamorphous silicon layer from an upper surface of the patterned featuresand the upper surface of the substrate using an anisotropic etchingprocess to provide the patterned features filled within sidewall spacersformed from the amorphous silicon layer.

In another implementation, a method of forming an amorphous siliconlayer on a substrate in a processing chamber is provided. The methodcomprises depositing a predetermined thickness of a sacrificialdielectric layer over a substrate. The method further comprises formingpatterned features on the substrate by removing portions of thesacrificial dielectric layer to expose an upper surface of thesubstrate. The method further comprises forming a self-assembledmonolayer (“SAM”) on the patterned features. The method furthercomprises depositing an amorphous silicon layer on the SAM and theexposed upper surface of the substrate. The method further comprisesselectively removing the amorphous silicon layer from an upper surfaceof the patterned features and the upper surface of the substrate usingan anisotropic etching process to provide the patterned features filledwithin sidewall spacers formed from the amorphous silicon layer.

In yet another implementation, a method of forming an amorphous siliconlayer on a substrate in a processing chamber is provided. The methodcomprises depositing a predetermined thickness of a sacrificialdielectric layer over a substrate. The method further comprises formingpatterned features on the substrate by removing portions of thesacrificial dielectric layer to expose an upper surface of thesubstrate. The method further comprises performing a plasma treatment tothe patterned features. The method further comprises forming aself-assembled monolayer (“SAM”) on the plasma treated patternedfeatures. The method further comprises depositing an amorphous siliconlayer on the SAM and the exposed upper surface of the substrate. Themethod further comprises selectively removing the amorphous siliconlayer from an upper surface of the patterned features and the uppersurface of the substrate using an anisotropic etching process to providethe patterned features filled within sidewall spacers formed from theamorphous silicon layer.

BRIEF DESCRIPTION OF THE DRAWINGS

So that the manner in which the above-recited features of the presentdisclosure can be understood in detail, a more particular description ofthe implementations, briefly summarized above, may be had by referenceto implementations, some of which are illustrated in the appendeddrawings. It is to be noted, however, that the appended drawingsillustrate only typical implementations of this disclosure and aretherefore not to be considered limiting of its scope, for the disclosuremay admit to other equally effective implementations.

FIG. 1 depicts a schematic illustration of an apparatus that can be usedfor the practice of implementations described herein;

FIG. 2 is a process flow diagram depicting one implementation of amethod for spacer formation with plasma treatment as described herein;

FIGS. 3A-3E are schematic side views of a structure formed according tothe process flow diagram of FIG. 2;

FIG. 4 is a process flow diagram depicting another implementation of amethod for spacer formation according to implementations describedherein;

FIGS. 5A-5F are schematic side views of a structure formed according tothe process flow diagram of FIG. 4; and

FIG. 6 is a process flow diagram depicting another implementation of amethod for spacer formation according to implementations describedherein.

To facilitate understanding, identical reference numerals have beenused, where possible, to designate identical elements that are common tothe figures. It is contemplated that elements and features of oneimplementation may be beneficially incorporated in other implementationswithout further recitation.

DETAILED DESCRIPTION

The following disclosure describes films and techniques for depositionof spacer films on a substrate. Certain details are set forth in thefollowing description and in FIGS. 1-6 to provide a thoroughunderstanding of various implementations of the disclosure. Otherdetails describing well-known structures and systems often associatedwith deposition and etching processes are not set forth in the followingdisclosure to avoid unnecessarily obscuring the description of thevarious implementations.

Many of the details, dimensions, angles and other features shown in theFigures are merely illustrative of particular implementations.Accordingly, other implementations can have other details, components,dimensions, angles and features without departing from the spirit orscope of the present disclosure. In addition, further implementations ofthe disclosure can be practiced without several of the details describedbelow.

Implementations described herein will be described below in reference toa thermal CVD and/or plasma-enhanced chemical vapor deposition (PECVD)process that can be carried out using any suitable thin film depositionsystem. Examples of suitable systems include the CENTURA® systems whichmay use a DXZ® processing chamber, PRECISION 5000® systems, PRODUCER®systems, PRODUCER® GT™ systems, PRODUCER® XP Precision™ systems andPRODUCER® SE™ systems which are commercially available from AppliedMaterials, Inc., of Santa Clara, Calif. Other tools capable ofperforming thermal CVD and PECVD processes may also be adapted tobenefit from the implementations described herein. In addition, anysystem enabling the thermal CVD and/or PECVD processes described hereincan be used to advantage. The apparatus description described herein isillustrative and should not be construed or interpreted as limiting thescope of the implementations described herein.

During the deposition of amorphous silicon films on oxide stacks,roughness and adhesion issues have been observed between the amorphoussilicon film and the underlying oxide film. Some of the implementationsdescribed herein provided methods of treating the underlying oxide filmprior to amorphous silicon deposition, which reduce roughness of theamorphous silicon film on oxide as well as improve theadhesion/nucleation between amorphous silicon and oxide stacks. In someimplementations of the present disclosure in order to reduce roughness,the underlying oxide film was exposed to a plasma treatment and/or aself-assembled monolayer (SAM) treatment just before the deposition ofthe amorphous silicon film. Not to be bound by theory but it is believedthat the plasma treatment process modifies dangling bonds present on thesilicon oxide surface to reduce roughness and improve adhesion.

“Self-assembled monolayer” (“SAM”) generally refers to a layer ofmolecules that are attached (e.g., by a chemical bond) to a surface andthat have adopted a preferred orientation with respect to that surfaceand even with respect to each other. The SAM typically comprises anorganized layer of amphiphilic molecules in which one end of themolecule, the “head group” shows a specific, reversible affinity for asubstrate. Selection of the head group will depend on the application ofthe SAM, with the type of SAM compounds based on the substrate utilized.Generally, the head group is connected to an alkyl chain in which a tailor “terminal end” can be functionalized, for example, to vary wettingand interfacial properties. Self-assembled monolayers have been shown,with sufficient time, to cover surfaces so completely that theproperties of that surface are changed. The molecules that form the SAMwill selectively attach to one material over another material (e.g.,silicon vs. dielectric) and if of sufficient density, can successfullyblock subsequent deposition allowing for selective deposition onmaterials not coated with the SAM.

FIG. 1 depicts a schematic illustration of a substrate processing system132 that can be used to perform to perform the oxide treatment andsubsequent amorphous silicon layer deposition in accordance withimplementations described herein. Examples of suitable systems includethe CENTURA® systems which may use a DxZ™ processing chamber, PRECISION5000® systems, PRODUCER™ systems, PRODUCER GT™ and the PRODUCER SE™processing chambers which are commercially available from AppliedMaterials, Inc., Santa Clara, Calif. It is contemplated that otherprocessing system, including those available from other manufacturers,may be adapted to practice the implementations described herein.

The substrate processing system 132 includes a process chamber 100coupled to a gas panel 130 and a controller 110. The process chamber 100generally includes a top wall 124, a sidewall 101 and a bottom wall 122that define a processing volume 126. A support pedestal 150 forsupporting a substrate is provided in the processing volume 126 of theprocess chamber 100. The support pedestal 150 is supported by a stem 160and may be typically fabricated from aluminum, ceramic, and othersuitable materials. The support pedestal 150 may be moved in a verticaldirection inside the process chamber 100 using a displacement mechanism(not shown).

The support pedestal 150 may include an embedded heating element 170suitable for controlling the temperature of a substrate 190 supported ona surface 192 of the support pedestal 150. The support pedestal 150 maybe resistively heated by applying an electric current from a powersupply 106 to the embedded heating element 170. The embedded heatingelement 170 may be made of a nickel-chromium wire encapsulated in anickel-iron-chromium alloy (e.g., INCOLOY®) sheath tube. The electriccurrent supplied from the power supply 106 is regulated by thecontroller 110 to control the heat generated by the embedded heatingelement 170, thereby maintaining the substrate 190 and the supportpedestal 150 at a substantially constant temperature during filmdeposition. The supplied electric current may be adjusted to selectivelycontrol the temperature of the support pedestal 150 between about 100degrees Celsius to about 700 degrees Celsius.

A temperature sensor 172, such as a thermocouple, may be embedded in thesupport pedestal 150 to monitor the temperature of the support pedestal150 in a conventional manner. The measured temperature is used by thecontroller 110 to control the power supplied to the embedded heatingelement 170 to maintain the substrate at a desired temperature.

A vacuum pump 102 is coupled to a port formed in the bottom of theprocess chamber 100. The vacuum pump 102 is used to maintain a desiredgas pressure in the process chamber 100. The vacuum pump 102 alsoevacuates post-processing gases and by-products of the process from theprocess chamber 100.

The substrate processing system 132 may further include additionalequipment for controlling the chamber pressure, for example, valves(e.g. throttle valves and isolation valves) positioned between theprocess chamber 100 and the vacuum pump 102 to control the chamberpressure.

A showerhead 120 having a plurality of apertures 128 is disposed on thetop of the process chamber 100 above the support pedestal 150. Theapertures 128 of the showerhead 120 are utilized to introduce processgases into the process chamber 100. The apertures 128 may have differentsizes, number, distributions, shape, design, and diameters to facilitatethe flow of the various process gases for different processrequirements. The showerhead 120 is connected to the gas panel 130 thatallows various gases to supply to the processing volume 126 duringprocessing. A plasma is formed from the process gas mixture exiting theshowerhead 120 to enhance thermal decomposition of the process gasesresulting in the deposition of material on a surface 191 of thesubstrate 190.

The showerhead 120 and support pedestal 150 may form a pair of spacedapart electrodes in the processing volume 126. One or more RF powersources 140 provide a bias potential through a matching network 138 tothe showerhead 120 to facilitate generation of plasma between theshowerhead 120 and the support pedestal 150. Alternatively, the RF powersources 140 and matching network 138 may be coupled to the showerhead120, support pedestal 150, or coupled to both the showerhead 120 and thesupport pedestal 150, or coupled to an antenna (not shown) disposedexterior to the process chamber 100. In one implementation, the RF powersources 140 may provide between about 100 Watts and about 3,000 Watts ata frequency of about 50 kHz to about 13.6 MHz. In anotherimplementation, the RF power sources 140 may provide between about 500Watts and about 1,800 Watts at a frequency of about 50 kHz to about 13.6MHz.

The controller 110 includes a central processing unit (CPU) 112, amemory 116, and a support circuit 114 utilized to control the processsequence and regulate the gas flows from the gas panel 130. The CPU 112may be of any form of a general-purpose computer processor that may beused in an industrial setting. The software routines can be stored inthe memory 116, such as random access memory, read only memory, floppy,or hard disk drive, or other form of digital storage. The supportcircuit 114 is conventionally coupled to the CPU 112 and may includecache, clock circuits, input/output systems, power supplies, and thelike. Bi-directional communications between the controller 110 and thevarious components of the substrate processing system 132 are handledthrough numerous signal cables collectively referred to as signal buses118, some of which are illustrated in FIG. 1.

In one implementation, the surface 191 of the substrate 190 issubstantially planar. Alternatively, the substrate 190 may havepatterned structures, a surface having trenches, holes, or vias formedtherein. The substrate 190 may also have a substantially planar surfacehaving a structure formed thereon or therein at a desired elevation.While the substrate 190 is illustrated as a single body, it isunderstood that the substrate 190 may contain one or more materials usedin forming semiconductor devices such as metal contacts, trenchisolations, gates, bitlines, or any other interconnect features. Thesubstrate 190 may comprise one or more metal layers, one or moredielectric materials, semiconductor material, and combinations thereofutilized to fabricate semiconductor devices. For example, the substrate190 may include an oxide material, a nitride material, a polysiliconmaterial, or the like, depending upon application.

In one implementation where a memory application is desired, thesubstrate 190 may include the silicon substrate material, an oxidematerial, and a nitride material, with or without polysilicon sandwichedin between. In another implementation, the substrate 190 may include aplurality of alternating oxide and nitride materials (i.e.,oxide-nitride-oxide (ONO)) deposited on a surface of the substrate (notshown). In various implementations, the substrate 190 may include aplurality of alternating oxide and nitride materials, one or more oxideor nitride materials, polysilicon or amorphous silicon materials, oxidesalternating with amorphous carbon, oxides alternating with polysilicon,undoped silicon alternating with doped silicon, undoped polysiliconalternating with doped polysilicon, or undoped amorphous siliconalternating with doped amorphous silicon. The substrate may be anysubstrate or material surface upon which film processing is performed.For example, the substrate 190 may be a material such as crystallinesilicon, silicon oxide, silicon oxynitride, silicon nitride, strainedsilicon, silicon germanium, tungsten, titanium nitride, doped or undopedpolysilicon, doped or undoped silicon wafers and patterned ornon-patterned wafers, silicon on insulator (SOI), carbon doped siliconoxides, silicon nitrides, doped silicon, germanium, gallium arsenide,glass, sapphire, low k dielectrics, and combinations thereof.

FIG. 2 is a process flow diagram depicting one implementation of amethod 200 for spacer formation with plasma treatment as describedherein. FIGS. 3A-3E are schematic side views of a structure formedaccording to the process of FIG. 2. The formation process can occur withor without plasma. The deposition can occur via a thermal CVD process ora PECVD process. It is contemplated that the self-aligned doublepatterning process is chosen for illustration purpose. The concepts ofthe present disclosure is equally applicable to other processes, forexample, single or dual patterning scheme, such as via/hole shrinkprocess, self-aligned triple patterning (SATP) process, or self-alignedquadruple patterning (SAQP) process, etc. that may involve the use ofprotective spacers with variable line width and spacing or protectivesacrificial layer as needed in various semiconductor processes such asNAND flash application, DRAM application, or CMOS application, etc.

The method 200 starts at operation 210 by forming a sacrificialstructural layer 320 on a substrate 300. The substrate may be similar tosubstrate 190. The sacrificial structural layer 320 may be asilicon-based material such as a silicon oxide, silicon nitride, orpolysilicon. Alternatively, the sacrificial structural layer 320 may bea carbon-based material such as amorphous carbon. In cases where acarbon-based sacrificial structural layer is desired, the sacrificialstructural layer 320 may be a combination of amorphous carbon andhydrogen (hydrogenated amorphous carbon film). One exemplary amorphouscarbon film may be a strippable Advanced Patterning Film™ (APF) materialcommercially available from Applied Materials, Inc. of Santa Clara,Calif. It is contemplated that the choice of materials used for thesacrificial structural layer 320 may vary depending upon theetching/ashing rate relative to the conformal protective layer to beformed thereon. While not shown, in certain implementations where acarbon-based sacrificial structural layer is used, one or moreanti-reflective coating layers may be deposited on the carbon-basedsacrificial structural layer to control the reflection of light during alithographic patterning process. Suitable anti-reflective coating layermay include silicon dioxide, silicon oxynitride, silicon nitride, orcombinations thereof. One exemplary anti-reflective coating layer may bea DARC™ material commercially available from Applied Materials, Inc. ofSanta Clara, Calif.

The substrate 300 may have a substantially planar surface 323 as shown.Alternatively, the substrate 300 may have patterned structures, asurface having trenches, holes, or vias formed therein. While thesubstrate 300 is illustrated as a single body, the substrate 300 maycontain one or more materials used in forming semiconductor devices suchas metal contacts, trench isolations, gates, bitlines, or any otherinterconnect features. In one implementation, the substrate 300 mayinclude one or more metal layers, one or more dielectric materials,semiconductor material, and combinations thereof utilized to fabricatesemiconductor devices. For example, the substrate 300 may include anoxide material, a nitride material, a polysilicon material, or the like,depending upon application. In cases where a memory application isdesired, the substrate 300 may include the silicon substrate material,an oxide material, and a nitride material, with or without polysiliconsandwiched in between.

At operation 220, a resist layer 330, such as a photoresist material, isdeposited on the sacrificial structural layer 320 as shown in FIG. 3A.

At operation 230, patterned features 321 formed from the sacrificialstructural layer 320 are produced on the substrate 300 using standardphotolithography and etching techniques, as shown in FIG. 3B. Thepatterned features may be formed from any suitable material, for exampleoxides, such as silicon dioxide, silicon oxynitride, or nitrides such assilicon nitride. The patterned features are sometimes referred to asplaceholders, mandrels or cores and have specific linewidths and/orspacing based upon the photoresist material used. The width of thepatterned features 321 may be adjusted by subjecting the resist layer330 to a trimming process. After the pattern has been transferred intothe sacrificial structural layer 320, any residual photoresist andhardmask material (if used) are removed using a suitable photoresiststripping process.

At operation 240, a plasma treatment may be performed to the sacrificialstructural layer 320. Not to be bound by theory but it is believed thatthe plasma treatment process reduces surface roughness of the of thesacrificial structural layer 320. In one implementation, the plasmatreatment is performed in the same chamber where the sacrificialstructure layer is formed. In one implementation, the plasma treatmentis performed in the same chamber where the amorphous silicon layer isformed. Alternatively, the plasma treatment may be performed in adifferent plasma process chamber.

According to one implementation of the present disclosure, the plasmatreatment may be performed by positioning a substrate having thesacrificial structure layer formed thereon in a plasma process chamber,such as the plasma chamber of FIG. 1, flowing a treatment gas to theplasma process chamber and striking a plasma in the plasma processchamber. In one implementation, the treatment gas may be argon (Ar),hydrogen (H₂), ammonia (NH₃), nitrogen (N₂), nitrous oxide (N₂O), orcombinations thereof. In one implementation, the plasma is acapacitively coupled plasma (CCP) or an inductively coupled plasma(ICP).

During the plasma treatment, the process chamber may be maintained at atemperature between about 100 degrees Celsius to about 500 degreesCelsius. The treatment gas may be flown to the process chamber at a flowrate between about 20 sccm to about 20,000 sccm. The chamber pressuremay be between about 0.01 Torr to about 50 Torr (e.g., between about 0.1Torr and 20 Torr). An RF power is applied to the treatment gas in theprocess chamber to generate plasma in the process chamber. In oneimplementation, the RF power may be provided between about 50 Watts andabout 3,000 Watts (e.g., between about 100 Watts and about 3,000 Watts;or between about 50 Watts and about 2,000 Watts) at a frequency of about50 kHz to about 13.6 MHz. In some implementations, the frequency isabout 2 MHz, 13.56 MHz, or a mixed frequency including 2 MHz and 13.56MHz. In some implementations, the substrate is biased during the plasmatreatment process. The bias applied to the substrate may be between 0Watts and 1,000 Watts. The plasma treatment may be performed for aduration between about 5 seconds to about 600 seconds (e.g., betweenabout 10 seconds to about 300 seconds).

At operation 250, an amorphous silicon layer 340 is depositedconformally or substantially conformally on the patterned features 321and the exposed surfaces of the substrate 300, as shown in FIG. 3C. Theamorphous silicon layer 340 is formed according to the implementationsdescribed herein. The thickness of the amorphous silicon layer 340 maybe between about 5 Å and about 200 Å.

In some implementations, conformal amorphous silicon (a-Si) depositioncan be achieved by maximizing the partial pressure of the siliconprecursor while minimizing the substrate temperature. Suitable siliconprecursors include, but are not limited to, polysilanes (Si_(x)H_(y)).For example, polysilanes include disilane (Si₂H₆), trisilane (Si₃H₅),tetrasilane (Si₄H₁₀), isotetrasilane, neopentasilane (Si₆H₁₂),cyclopentasilane (Si₅H₁₀), hexasilane (Si₆H₁₄), cyclohexasilane (Si₆H₁₂)or, in general, Si_(x)H_(y) with x=2 or more, or combinations thereof.For example, disilane, which has a moderate processing temperature andhigh vapor pressure, may be used as the silicon precursor, alone or incombination with other species.

In some implementations, the silicon precursor comprises substantiallyonly disilane. As used herein, the phrase “substantially only disilane”means that at least 95% of the active species is disilane. Other gases,such as carrier gases and inert gases, can be included in this amount.

The deposited film includes an outgassable species that may evolve oroutgas from the film, for example, hydrogen. The inert degas environmentprovides an opportunity for the gaseous species to evolve, minimizingbubbling of the final film. The inert degas environment can include anycondition which allows or encourages removal of the outgassable speciesof the film. For example, the degas environment may consist essentiallyof an inert gas. As used in this regard, “consists essentially of” meansthat there is no gaseous species that interfere with the outgassing ofthe deposited film. Other reactive species may be present withoutinhibiting degassing of the film while still consisting essentially ofan inert gas. In some implementations, the inert degas environment is anenvironment where there is substantially no chemical reactions occurringon the deposited film. For example, there may be substantially nochemical species that may be reactive with the deposited film. In someimplementations, the degas environment does not use UV light, plasma ormicrowave radiation to cause degassing of the outgassable species.

In one or more implementations, the amorphous silicon film is depositedby a chemical vapor deposition process. Although similar processingchambers can be used, Chemical Vapor Deposition (CVD) processes aredifferent from Atomic Layer Deposition (ALD). An ALD process is aself-limiting process where a single layer of material is depositedusing a binary (or higher order) reaction. The process continues untilall available active sites on the substrate surface have been reacted. ACVD process is not self-limiting, and a film can be grown to anypredetermined thickness.

Suitable inert gases include, but are not limited to, one or more ofargon, helium, nitrogen, and/or mixtures thereof. In someimplementations, the inert degas environment comprises substantially nooxygen. As used in this regard, “substantially no oxygen” means that theinert degas environment has less than about 1% (on an atomic basis)oxygen atoms in the ambient conditions adjacent the substrate surface.

In one or more implementations, the outgassable species compriseshydrogen. As used in this regard, an outgassable species comprisinghydrogen can include one or more of hydrogen, SiH₂, SiH₃, SiH₄, and/orother low-order silanes.

The pressure in the processing chamber, or region of the processingchamber can be independently controlled for the precursor exposure anddegas environment. In some implementations, exposure to each of thesilicon precursor and the degas environment occurs at a pressure in therange of about 50 mTorr to about 200 Torr. In some implementations, thesilicon precursor is exposed to the substrate at a pressure greater thanor equal to about 500 mTorr, or greater than or equal to about 1 Torr,or greater than or equal to about 5 Torr, or greater than or equal toabout 10 Torr, or greater than or equal to about 20 Torr, or greaterthan or equal to about 30 Torr.

The temperature at which the substrate surface is exposed to theprecursor or degas environment can be varied depending on, for example,the thermal budget of the device being formed and the precursor. In someimplementations, exposure to each of the precursor and the degasenvironment occurs at a temperature in the range of about 350 degreesCelsius to about 700 degrees Celsius. In one or more implementations,the silicon halide precursor is exposed to the substrate at atemperature in the range of about 375 degrees Celsius to about 600degrees Celsius, or in the range of about 400 degrees Celsius to about550 degrees Celsius.

In some implementations, disilane-based conformal a-Si processes aredeposited with a substrate temperature less than about 450 degreesCelsius, and disilane partial pressure is greater than or equal to about20 Torr. In an exemplary implementation, the substrate is exposed to thesilicon precursor at a pressure greater than or equal to about 20 Torrat a temperature in the range of about 400 degrees Celsius to about 550degrees Celsius.

At operation 260, after the amorphous silicon layer 340 has beendeposited conformally on the patterned features 321, the amorphoussilicon layer 340 is anisotropically etched (a vertical etch) to exposean upper surface of the substrate 300 in areas 311 and expose an uppersurface of the patterned features 321, resulting in the patternedfeatures 321 (formed from the sacrificial structural layer 320)protected by non-sacrificial amorphous silicon-based sidewall spacers341, as shown in FIG. 3D.

At operation 270, the patterned features 321 (formed from thesacrificial structural layer 320) are removed using a conventionalplasma etching process or other suitable wet stripping process, leavingnon-sacrificial amorphous silicon-based sidewall spacers 341 as shown inFIG. 3E. The plasma etching process may be done by introducing afluorine-based etching chemistry into a plasma above the substrate. Dueto the improved material quality and coverage, the non-sacrificialamorphous silicon-based sidewall spacers 341 are not damaged becausethey have very good selectivity to the fluorine-based reactive etchingchemistry or the wet strip-based chemistry. Upon removal of thepatterned features 321, the remaining non-sacrificial amorphoussilicon-based sidewall spacers 341 may be used as a hardmask for etchingthe underlying layer, layer stack, or structure. Particularly, thedensity of the non-sacrificial amorphous silicon-based sidewall spacers341 in accordance with this patterning process is twice that of thepatterned features 321, the pitch of the non-sacrificial amorphoussilicon-based sidewall spacers 341 is half the pitch of the patternedfeatures 321. The non-sacrificial amorphous silicon-based sidewallspacers 341 maybe used as a hardmask to pattern underlying materiallayers.

FIG. 4 is a process flow diagram depicting another implementation of amethod 400 for spacer formation according to implementations describedherein. FIGS. 5A-5E are schematic side views of a structure formedaccording to the process flow diagram of FIG. 4. The formation processcan occur with or without plasma. The deposition can occur via a thermalCVD process or a PECVD process. It is contemplated that the self-aligneddouble patterning process is chosen for illustration purpose. Theconcepts of the present disclosure is equally applicable to otherprocesses, for example, single or dual patterning scheme, such asvia/hole shrink process, self-aligned triple patterning (SATP) process,or self-aligned quadruple patterning (SAQP) process, etc. that mayinvolve the use of protective spacers with variable line width andspacing or protective sacrificial layer as needed in varioussemiconductor processes such as NAND flash application, DRAMapplication, or CMOS application, etc.

The method 400 starts at operation 410 by forming a sacrificialstructural layer 520 on a substrate 500. The substrate may be similar tosubstrate 190. The sacrificial structural layer 520 may be asilicon-based material such as a silicon oxide, silicon nitride, orpolysilicon. Alternatively, the sacrificial structural layer 520 may bea carbon-based material such as amorphous carbon. In cases where acarbon-based sacrificial structural layer is desired, the sacrificialstructural layer 520 may be a combination of amorphous carbon andhydrogen (hydrogenated amorphous carbon film). One exemplary amorphouscarbon film may be a strippable Advanced Patterning Film™ (APF) materialcommercially available from Applied Materials, Inc. of Santa Clara,Calif. It is contemplated that the choice of materials used for thesacrificial structural layer 520 may vary depending upon theetching/ashing rate relative to the conformal protective layer to beformed thereon. While not shown, in certain implementations where acarbon-based sacrificial structural layer is used, one or moreanti-reflective coating layers may be deposited on the carbon-basedsacrificial structural layer to control the reflection of light during alithographic patterning process. Suitable anti-reflective coating layermay include silicon dioxide, silicon oxynitride, silicon nitride, orcombinations thereof. One exemplary anti-reflective coating layer may bea DARC™ material commercially available from Applied Materials, Inc. ofSanta Clara, Calif.

The substrate 500 may have a substantially planar surface 523 as shown.Alternatively, the substrate 500 may have patterned structures, asurface having trenches, holes, or vias formed therein. While thesubstrate 500 is illustrated as a single body, the substrate 500 maycontain one or more materials used in forming semiconductor devices suchas metal contacts, trench isolations, gates, bitlines, or any otherinterconnect features. In one implementation, the substrate 500 mayinclude one or more metal layers, one or more dielectric materials,semiconductor material, and combinations thereof utilized to fabricatesemiconductor devices. For example, the substrate 500 may include anoxide material, a nitride material, a polysilicon material, or the like,depending upon application. In cases where a memory application isdesired, the substrate 500 may include the silicon substrate material,an oxide material, and a nitride material, with or without polysiliconsandwiched in between.

At operation 420, a resist layer 530, such as a photoresist material, isdeposited on the sacrificial structural layer 520 as shown in FIG. 5A.

At operation 430, patterned features 521 formed from the sacrificialstructural layer 520 are produced on the substrate 500 using standardphotolithography and etching techniques, as shown in FIG. 5B. Thepatterned features may be formed from any suitable material, for exampleoxides, such as silicon dioxide, silicon oxynitride, or nitrides such assilicon nitride. The patterned features are sometimes referred to asplaceholders, mandrels or cores and have specific linewidths and/orspacing based upon the photoresist material used. The width of thepatterned features 521 may be adjusted by subjecting the resist layer530 to a trimming process. After the pattern has been transferred intothe sacrificial structural layer 520, any residual photoresist andhardmask material (if used) are removed using a suitable photoresiststripping process.

At operation 440, the substrate 500 is exposed to a SAM precursor toform a SAM 535 on the patterned features 521. Not to be bound by theorybut it is believed that the SAM 535 improves adhesion of the amorphoussilicon layer to the patterned features 521. It is believed that the SAM535 helps anchor the amorphous silicon layer to the patterned features521. Depending upon the materials used and the SAM precursors used, theSAM precursor may be a solution based precursor or a gaseous precursor.The SAM precursor may comprise the SAM molecules, precursors that formthe SAM molecules, or both. The adsorbed SAM molecules form the SAM 535.

The SAM 535 comprises an organized layer of the SAM molecules, which maybe amphiphilic, in which one end of the molecule, the head group shows aspecific, reversible affinity for the silicon oxide material that formsthe patterned features 521. The head group is typically connected to analkyl chain in which a terminal end “R” can be functionalized. The SAM535 is formed by chemisorption of the head group onto the patternedfeatures 521, followed by two-dimensional organization of thehydrophobic tail groups. SAM adsorption can occur from solution byimmersion of the substrate 500 into a dilute solution containing the SAMmolecules. In one implementation, the SAM 535 is deposited via spincoating from a solution. SAM adsorption can also occur from vapordeposition by exposing the substrate 500 to a gaseous precursor. Thethickness of the SAM 535 can be adjusted by adjusting the carbon chainlength of the alkyl chain of the SAM molecule. Generally, the SAM 535may only be formed on the surface that has chemical reaction capabilitywith the SAM molecules.

In the implementations depicted in FIG. 5C, the SAM precursor utilizedto form the SAM 535 is selected to only chemically react with theexposed surface of the patterned features 521, (e.g., a silicon oxidematerial) and the exposed surface of the subsequently depositedamorphous silicon layer. By doing so, the SAM 535 may be predominantlyformed on the exposed surface of the patterned features 521.

Examples of SAM materials, which may be utilized, include the materialsdescribed hereinafter, including combinations, mixtures, and graftsthereof, in addition to other SAM materials having characteristicssuitable for blocking deposition of subsequently deposited materials ina semiconductor fabrication process. In one implementation, the SAMmaterials may be carboxylic acid materials, such as methylcarboxylicacids, ethylcarboxylic acids, propylcarboxylic acids, butylcarboxylicacids, pentylcarboxylic acids, hexylcarboxylic acids, heptylcarboxylicacids, octylcarboxylic acids, nonylcarboxylic acids, decylcarboxylicacids, undecylcarboxylic acids, dodecylcarboxylic acids,tridecylcarboxylic acids, tetradecylcarboxylic acids,pentadecylcarboxylic acids, hexadecylcarboxylic acids,heptadecylcarboxylic acids, octadecylcarboxylic acids, andnonadecylcarboxylic acids.

In another implementation, the SAM materials may be phosphonic acidmaterials, such as methylphosphonic acid, ethylphosphonic acid,propylphosphonic acid, butylphosphonic acid, pentylphosphonic acid,hexylphosphonic acid, heptylphosphonic acid, octylphosphonic acid,nonylphosphonic acid, decylphosphonic acid, undecylphosphonic acid,dodecylphosphonic acid, tridecylphosphonic acid, tetradecylphosphonicacid, pentadecylphosphonic acid, hexadecylphosphonic acid,heptadecylphosphonic acid, octadecylphosphonic acid, andnonadecylphosphonic acid.

In another implementation, the SAM materials may be thiol materials,such as methanethiol, ethanethiol, propanethiol, butanethiol,pentanethiol, hexanethiol, heptanethiol, octanethiol, nonanethiol,decanethiol, undecanethiol, dodecanethiol, tridecanethiol,tetradecanethiol, pentadecanethiol, hexadecanethiol, heptadecanethiol,octadecanethiol, and nonadecanethiol.

In another implementation, the SAM materials may be silylaminematerials, such as tris(dimethylamino)methylsilane,tris(dimethylamino)ethylsilane, tris(dimethylamino)propylsilane,tris(dimethylamino)butylsilane, tris(dimethylamino)pentylsilane,tris(dimethylamino)hexylsilane, tris(dimethylamino)heptylsilane,tris(dimethylamino)octylsilane, tris(dimethylamino)nonylsilane,tris(dimethylamino)decylsilane, tris(dimethylamino)undecylsilanetris(dimethylamino)dodecylsilane, tris(dimethylamino)tridecylsilane,tris(dimethylamino)tetradecylsilane,tris(dimethylamino)pentadecylsilane, tris(dimethylamino)hexadecylsilane,tris(dimethylamino)heptadecylsilane, tris(dimethylamino)octadecylsilane,and tris(dimethylamino)nonadecylsilane.

In another implementation, the SAM materials may be chlorosilanematerials, such as methyltrichlorosilane, ethyltrichlorosilane,propyltrichlorosilane, butyltrichlorosilane, pentyltrichlorosilane,hexyltrichlorosilane, heptyltrichlorosilane, octyltrichlorosilane,nonyltrichlorosilane, decyltrichlorosilane, undecyltrichlorosilane,dodecyltrichlorosilane, tridecyltrichlorosilane,tetradecyltrichlorosilane, pentadecyltrichlorosilane,hexadecyltrichlorosilane, heptadecyltrichlorosilane,octadecyltrichlorosilane, and nonadecyltrichlorosilane.

In another implementation, the SAM materials may be oxysilane materials,such as methyltrimethoxysilane, methyltriethoxysilane,ethyltrimethoxysilane, ethyltriethoxysilane, propyltrimethoxysilane,propyltriethoxysilane, butyltrimethoxysilane, butyltriethoxysilane,pentyltrimethoxysilane, pentyltriethoxysilane, hexyltrimethoxysilane,hexyltriethoxysilane, heptyltrimethoxysilane, heptyltriethoxysilane,octyltrimethoxysilane, octyltriethoxysilane, nonyltrimethoxysilane,nonyltriethoxysilane, decyltrimethoxysilane, decyltriethoxysilane,undecyltrimethoxysilane, undecyltriethoxysilane,dodecyltrimethoxysilane, dodecyltriethoxysilane,tridecyltrimethoxysilane, tridecyltriethoxysilane,tetradecyltrimethoxysilane, tetradecyltriethoxysilane,pentadecyltrimethoxysilane, pentadecyltriethoxysilane,hexadecyltrimethoxysilane, hexadecyltriethoxysilane,heptadecyltrimethoxysilane, heptadecyltriethoxysilane,octadecyltrimethoxylsilane, octadecyltriethoxysilane,nonadecyltrimethoxysilane, and nonadecyltriethoxysilane.

In another implementation, the SAM materials may have a fluorinated Rgroup, such as (1,1,2,2-perfluorodecyl)trichlorosilane,trichloro(1,1,2,2-perfluorooctyl)silane,(trideca-fluoro-1,1,2,2-tetrahydrooctyl)trichlorosilane,(tridecafluoro-1,1,2,2-tetrahydro-octyl)triethoxysilane,(tridecafluoro-1,1,2,2-tetrahydrooctyl)methyldichlorosilane,(tridecafluoro-1,1,2,2-tetrahydrooctyl)dimethylchlorosilane, and(heptadecafluoro-1,1,2,2-tetrahydrodecyl)trichlorosilane, among others.It is contemplated that combinations and mixtures of the aforementionedmaterials are within the scope of this disclosure.

SAM adsorption can occur from solution by immersion of the substrate 500into a dilute solution containing the SAM molecules. In oneimplementation, the SAM 535 is deposited via spin coating from asolution. SAM adsorption can also occur from vapor deposition byexposing the substrate 500 to a gaseous precursor. The thickness of theSAM 535 can be adjusted by adjusting the carbon chain length of thealkyl chain of the SAM molecule. Generally, the SAM 535 may be formed onthe surface that has chemical reaction capability with the SAMmolecules.

In one implementation, the SAM adsorption may be a vapor phasedeposition process. In this implementation, SAM molecules may bevaporized in an ampoule maintained at a temperature between about 25degrees Celsius and about 300 degrees Celsius, such as between about 125degrees Celsius and about 200 degrees Celsius. The substrate 500 may bemaintained at a temperature of between about 25 degrees Celsius andabout 400 degrees Celsius, such as between about 50 degrees Celsius andabout 200 degrees Celsius, for example, between about 100 degreesCelsius and about 175 degrees Celsius. A pressure of thesubstrate-processing environment, such as the processing volume of aprocessing chamber, may be maintained at a pressure of between about 1mT and about 1520 T, such as between about 5 T and about 600 T. Acarrier gas may be utilized to facilitate delivery of vapor phase SAMmolecules and the carrier gas, depending on the volume of the processingchamber, may be delivered at a flow rate of between about 25 sccm andabout 3000 sccm, such as between about 50 sccm and about 1000 sccm.Suitable carrier gases include gases, such as noble gases or the like,that are generally inert under SAM adsorption conditions that facilitatedelivery of the SAM molecules to the substrate surfaces. The SAMmolecules may be exposed to the substrate 500 in operation 440 for anamount of time between about 1 second and about 48 hours, for example,between about 1 minute and about 120 minutes.

At operation 450, an amorphous silicon layer 540 is depositedconformally or substantially conformally on the patterned features 521and the exposed surfaces of the substrate 500, as shown in FIG. 5D. Theamorphous silicon layer 540 is formed according to the implementationsdescribed herein. The thickness of the amorphous silicon layer 540 maybe between about 5 Å and about 200 Å.

In some implementations, conformal amorphous silicon (a-Si) depositioncan be achieved by maximizing the partial pressure of the siliconprecursor while minimizing the substrate temperature. Suitable siliconprecursors include, but are not limited to, poly-silanes (Si_(x)H_(y)).For example, poly-silanes include disilane (Si₂H₆), trisilane (Si₃H₅),tetrasilane (Si₄H₁₀), isotetrasilane, neopentasilane (Si₆H₁₂),cyclopentasilane (Si₅H₁₀), hexasilane (C₆H₁₄), cyclohexasilane (Si₆H₁₂)or, in general, Si_(x)H_(y) with x=2 or more, or combinations thereof.For example, disilane, which has a moderate processing temperature andhigh vapor pressure, may be used as the silicon precursor, alone or incombination with other species.

In some implementations, the silicon precursor comprises substantiallyonly disilane. As used herein, the phrase “substantially only disilane”means that at least 95% of the active species is disilane. Other gases,such as carrier gases and inert gases, can be included in this amount.

The deposited film includes an outgassable species that may evolve oroutgas from the film, for example, hydrogen. The inert degas environmentprovides an opportunity for the gaseous species to evolve, minimizingbubbling of the final film. The inert degas environment can include anycondition which allows or encourages removal of the outgassable speciesof the film. For example, the degas environment may consist essentiallyof an inert gas. As used in this regard, “consists essentially of” meansthat there is no gaseous species that interfere with the outgassing ofthe deposited film. Other reactive species may be present withoutinhibiting degassing of the film while still consisting essentially ofan inert gas. In some implementations, the inert degas environment is anenvironment where there is substantially no chemical reactions occurringon the deposited film. For example, there may be substantially nochemical species that may be reactive with the deposited film. In someimplementations, the degas environment does not use UV light, plasma ormicrowave radiation to cause degassing of the outgassable species.

In one or more implementations, the amorphous silicon film is depositedby a chemical vapor deposition process. Although similar processingchambers can be used, Chemical Vapor Deposition (CVD) processes aredifferent from Atomic Layer Deposition (ALD). An ALD process is aself-limiting process where a single layer of material is depositedusing a binary (or higher order) reaction. The process continues untilall available active sites on the substrate surface have been reacted. ACVD process is not self-limiting, and a film can be grown to anypredetermined thickness.

Suitable inert gases include, but are not limited to, one or more ofargon, helium, nitrogen, and/or mixtures thereof. In someimplementations, the inert degas environment comprises substantially nooxygen. As used in this regard, “substantially no oxygen” means that theinert degas environment has less than about 1% (on an atomic basis)oxygen atoms in the ambient conditions adjacent the substrate surface.

In one or more implementations, the outgassable species compriseshydrogen. As used in this regard, an outgassable species comprisinghydrogen can include one or more of hydrogen, SiH₂, SiH₃, SiH₄, and/orother low-order silanes.

The pressure in the processing chamber, or region of the processingchamber can be independently controlled for the precursor exposure anddegas environment. In some implementations, exposure to each of thesilicon precursor and the degas environment occurs at a pressure in therange of about 50 mTorr to about 200 Torr. In some implementations, thesilicon precursor is exposed to the substrate at a pressure greater thanor equal to about 500 mTorr, or greater than or equal to about 1 Torr,or greater than or equal to about 5 Torr, or greater than or equal toabout 10 Torr, or greater than or equal to about 20 Torr, or greaterthan or equal to about 30 Torr.

The temperature at which the substrate surface is exposed to theprecursor or degas environment can be varied depending on, for example,the thermal budget of the device being formed and the precursor. In someimplementations, exposure to each of the precursor and the degasenvironment occurs at a temperature in the range of about 350 degreesCelsius to about 700 degrees Celsius. In one or more implementations,the silicon halide precursor is exposed to the substrate at atemperature in the range of about 375 degrees Celsius to about 600degrees Celsius, or in the range of about 400 degrees Celsius to about550 degrees Celsius.

In some implementations, disilane-based conformal a-Si processes aredeposited with a substrate temperature less than about 450 degreesCelsius, and disilane partial pressure is greater than or equal to about20 Torr. In an exemplary implementation, the substrate is exposed to thesilicon precursor at a pressure greater than or equal to about 20 Torrat a temperature in the range of about 400 degrees Celsius to about 550degrees Celsius.

At operation 460, after the amorphous silicon layer 540 has beendeposited conformally on the patterned features 521, the amorphoussilicon layer 540 is anisotropically etched (a vertical etch) to exposean upper surface of the substrate 500 in areas 511 and expose an uppersurface of the patterned features 521, resulting in the patternedfeatures 521 (formed from the sacrificial structural layer 520)protected by non-sacrificial amorphous silicon-based sidewall spacers541, as shown in FIG. 5E.

At operation 470, the patterned features 521 (formed from thesacrificial structural layer 520) are removed using a conventionalplasma etching process or other suitable wet stripping process, leavingthe non-sacrificial amorphous silicon-based sidewall spacers 541 asshown in FIG. 5F. The plasma etching process may be done by introducinga fluorine-based etching chemistry into a plasma above the substrate.Due to the improved material quality and coverage, the non-sacrificialamorphous silicon-based sidewall spacers 541 are not damaged becausethey have very good selectivity to the fluorine-based reactive etchingchemistry or the wet strip-based chemistry. Upon removal of thepatterned features 521, the remaining non-sacrificial amorphoussilicon-based sidewall spacers 541 may be used as a hardmask for etchingthe underlying layer, layer stack, or structure. Particularly, thedensity of the non-sacrificial amorphous silicon-based sidewall spacers541 in accordance with this patterning process is twice that of thephoto-lithographically patterned features 521, the pitch of thenon-sacrificial amorphous silicon-based sidewall spacers 541 is half thepitch of the patterned features 521. The non-sacrificial amorphoussilicon-based sidewall spacers 541 maybe used as a hardmask to patternunderlying material layers.

FIG. 6 is a process flow diagram depicting another implementation of amethod 600 for spacer formation according to implementations describedherein. The method 600 is similar to method 200 and method 400 exceptthat method 600 incorporates both the plasma treatment process of method400 and the SAM formation of method 400. At operation 610, a sacrificialstructural layer is formed on a substrate, similar to operation 210 andoperation 410. At operation 620, a resist layer is formed on thesacrificial structural layer, similar to operation 220 and operation420. At operation 630, patterned features are formed from thesacrificial structural layer, similar to operation 230 and operation430. At operation 640, the patterned features are treated with plasma,similar to operation 240. At operation 650, a SAM is formed on thepatterned features, similar to operation 440. At operation 660, anamorphous silicon layer is formed on the patterned features and exposedsurfaces of the substrate, similar to operation 250 and operation 450.At operation 670, the amorphous silicon layer is etched using adirectional etch process, similar to operation 260 and operation 460. Atoperation 680, the patterned features located within the amorphoussilicon sidewall spacers to provide non-sacrificial amorphous siliconsidewall spacers.

In summary, some implementations of the present disclosure provideimproved methods for amorphous silicon spacer formation. Some of theimproved methods described herein provide for high conformality, lowpattern loading and BEOL compatible processing temperatures. Some of theimproved methods described herein further provide for reduced roughnessof an underlying oxide film and improved adhesion with a subsequentlydeposited amorphous silicon film. In some implementations, theunderlying oxide film is exposed to a plasma treatment, which reducesthe roughness of the subsequently deposited amorphous silicon film aswell as improve the adhesion between the underlying oxide film and theamorphous silicon film. In some implementations, a SAM is formed on theunderlying oxide layer to improve adhesion with the subsequentlydeposited amorphous silicon layer.

When introducing elements of the present disclosure or exemplary aspectsor implementation(s) thereof, the articles “a,” “an,” “the” and “said”are intended to mean that there are one or more of the elements.

The terms “comprising,” “including” and “having” are intended to beinclusive and mean that there may be additional elements other than thelisted elements.

While the foregoing is directed to implementations of the presentdisclosure, other and further implementations of the present disclosuremay be devised without departing from the basic scope thereof, and thescope thereof is determined by the claims that follow.

The invention claimed is:
 1. A method of forming an amorphous siliconlayer on a substrate in a processing chamber, comprising: depositing apredetermined thickness of a sacrificial dielectric layer over asubstrate; forming patterned features on the substrate by removingportions of the sacrificial dielectric layer to expose an upper surfaceof the substrate; performing a plasma treatment to the patternedfeatures; depositing an amorphous silicon layer on the patternedfeatures and the exposed upper surface of the substrate; and selectivelyremoving the amorphous silicon layer from an upper surface of thepatterned features and the upper surface of the substrate using ananisotropic etching process to provide the patterned features filledwithin sidewall spacers formed from the amorphous silicon layer.
 2. Themethod of claim 1, wherein performing the plasma treatment comprises:flowing a treatment gas into the processing chamber; and generating aplasma in the processing chamber to treat the patterned features of thesubstrate.
 3. The method of claim 2, wherein the treatment gas comprisesargon.
 4. The method of claim 2, wherein the treatment gas comprises oneof argon, hydrogen, nitrogen, nitrous oxide, ammonia, and combinationsthereof.
 5. The method of claim 1, wherein performing the plasmatreatment to the patterned features and depositing the amorphous siliconlayer on the patterned features and the exposed upper surface of thesubstrate are performed in the same processing chamber.
 6. The method ofclaim 1, wherein the sacrificial dielectric layer comprises siliconoxide.
 7. The method of claim 1, wherein depositing the amorphoussilicon layer on the patterned features and the exposed upper surface ofthe substrate comprises exposing the patterned features to a siliconprecursor to form an amorphous silicon film having an outgassablespecies comprising hydrogen.
 8. The method of claim 7, furthercomprising exposing the amorphous silicon film to an inert degasenvironment to remove the outgassable species from the amorphous siliconfilm to form a degassed amorphous silicon film.
 9. The method of claim8, wherein the silicon precursor comprises one or more of disilane,trisilane, tetrasilane, isotetrasilane, neopentasilane,cyclopentasilane, hexasilane, cyclohexasilane, and combinations thereof.10. The method of claim 9, wherein the silicon precursor is disilane.11. The method of claim 8, wherein the inert degas environment consistsessentially of an inert gas.
 12. The method of claim 11, wherein theinert gas comprises one or more of argon, helium, and nitrogen.
 13. Themethod of claim 12, wherein exposure to each of the silicon precursorand the inert degas environment occurs at a pressure in a range of about50 mTorr to about 200 Torr.
 14. The method of claim 13, wherein exposureto each of the silicon precursor and the inert degas environment occursat a temperature in a range of about 350 degrees Celsius to about 700degrees Celsius.
 15. The method of claim 14, wherein each exposure tothe silicon precursor and the inert degas environment grows the degassedamorphous silicon film with a thickness in a range of about 5 Å to about20 Å.
 16. The method of claim 14, wherein the degassed amorphous siliconfilm has a thickness in a range of about 100 Å to about 1 μm.
 17. Themethod of claim 16, further comprising removing the patterned featuresfrom the substrate.
 18. The method of claim 17, wherein depositing theamorphous silicon layer on the patterned features and the exposed uppersurface of the substrate is performed using a thermal chemical vapordeposition process.
 19. A method of forming an amorphous silicon layeron a substrate in a processing chamber, comprising: depositing apredetermined thickness of a sacrificial dielectric layer over asubstrate; forming patterned features on the substrate by removingportions of the sacrificial dielectric layer to expose an upper surfaceof the substrate; forming a self-assembled monolayer (“SAM”) on thepatterned features; depositing an amorphous silicon layer on the SAM andthe exposed upper surface of the substrate; and selectively removing theamorphous silicon layer from an upper surface of the patterned featuresand the upper surface of the substrate using an anisotropic etchingprocess to provide the patterned features filled within sidewall spacersformed from the amorphous silicon layer.
 20. A method of forming anamorphous silicon layer on a substrate in a processing chamber,comprising: depositing a predetermined thickness of a sacrificialdielectric layer over a substrate; forming patterned features on thesubstrate by removing portions of the sacrificial dielectric layer toexpose an upper surface of the substrate; performing a plasma treatmentto the patterned features; forming a self-assembled monolayer (“SAM”) onthe plasma treated patterned features; depositing an amorphous siliconlayer on the SAM and the exposed upper surface of the substrate; andselectively removing the amorphous silicon layer from an upper surfaceof the patterned features and the upper surface of the substrate usingan anisotropic etching process to provide the patterned features filledwithin sidewall spacers formed from the amorphous silicon layer.